PCE-66H is a compact and heatable Ultraviolet (UV) Ozone cleaner, which is a dedicated system to remove a variety of contaminants from the surfaces of substrates samples. UV Ozone cleaning is simple to use in the dry process which is a highly effective method to clean surfaces. The cleaning effect is caused by irradiating the surface of a substrate with suitable lamps creating enough energy in the UltraViolet spectrum range. It is the photo-sensitized oxidation process by atomized Oxygen and highly reactive Ozone. The UV radiation directly to the surface stimulates the reaction. Volatile hydrocarbon products are produced. The removal of hydrocarbons in nanometer thickness by oxidation results in ultra-clean surfaces with significant wettability. This is very important before the thin-film coating process of glass and ceramic surfaces. Built-in heating tube, capable of heating the substrate, with a maximum heating temperature of 150°C. Temperature control is achieved through PID control, allowing for the setting of 30-segment temperature programs.